Study for the non-contact characterization of metallization ageing of power electronic semiconductor devices using the eddy current technique

The ageing of the metallization layers of power semiconductor dies may be the cause of failure of power semiconductor modules. Usual indicators of failure like on-state voltage drops make it difficult to highlight the deterioration of the metallization layer. In this study, we evaluate the relevance of the characterization of power device metallizations by means of the eddy current sensors. Experimental results show the ability to monitor the state and the evolution of the metallization ageing with such a technique.

[1]  Y. Le Bihan,et al.  Multi sensor probe and defect classification in eddy current tubing inspection , 2006 .

[2]  Marc Legros,et al.  Characterization and modelling of ageing failures on power MOSFET devices , 2007, Microelectron. Reliab..

[3]  S. Lefebvre,et al.  Experimental investigations of trench field stop IGBT under repetitive short-circuits operations , 2008, 2008 IEEE Power Electronics Specialists Conference.

[4]  Mauro Ciappa,et al.  Selected failure mechanisms of modern power modules , 2002, Microelectron. Reliab..

[5]  H. Libby Introduction to Electromagnetic Nondestructive Test Methods , 1971 .

[6]  Pierre-Yves Joubert,et al.  Source separation techniques applied to the detection of subsurface defects in the eddy current NDT of aeronautical lap-joints , 2010 .

[7]  S. Lefebvre,et al.  Study of ageing of the metallization layer of power semiconductor devices , 2010 .

[8]  Philippe Dupuy,et al.  Characterization of ageing failures on power MOSFET devices by electron and ion microscopies , 2009, Microelectron. Reliab..

[9]  J. Lutz,et al.  Power cycling induced failure mechanisms in the viewpoint of rough temperature environment , 2008 .

[10]  Yasushi Yamada,et al.  Reliability of wire-bonding and solder joint for high temperature operation of power semiconductor device , 2007, Microelectron. Reliab..

[11]  S. N. Vernon The universal impedance diagram of the ferrite pot core eddy current transducer , 1989 .

[12]  Yann Le Bihan,et al.  Non destructive evaluation of small defects using an eddy current microcoil sensor array , 2008 .

[13]  Michael Glavanovics,et al.  Analysis of wire bond and metallization degradation mechanisms in DMOS power transistors stressed under thermal overload conditions , 2004, Microelectron. Reliab..

[14]  Stéphane Lefebvre,et al.  Failure modes on low voltage power MOSFETs under high temperature application , 2007, Microelectron. Reliab..

[15]  Eric B. Flynn,et al.  A Bayesian approach to optimal sensor placement for structural health monitoring with application to active sensing , 2010 .

[16]  W. Staszewski,et al.  Health monitoring of aerospace composite structures – Active and passive approach , 2009 .