Development of x-ray optics for advanced research light sources

X-ray mirrors are needed for beam steering, beam alignment and monochromatisation at advanced research light sources like 3rd generation synchrotron sources (e.g. PETRA III in Hamburg) or Free-Electron Lasers (for instance FLASH or the European XFEL). At the Helmholtz-Zentrum Geesthacht (formerly GKSS), an in-house designed magnetron sputtering facility for the deposition of single layers and multilayers has been installed for the development of x-ray optics. Earlier results showed that the thin-film fabrication of 1.5 m long amorphous carbon coatings was very successful. These single layers are currently used as total reflection mirrors at FLASH to steer the photon beam to the various beamlines. A major advantage of the sputtering facility is that it is now possible to prepare one, two or more mirrors with similar properties over the whole deposition length. In this contribution we present results for the x-ray optical properties of C, B4C and W coatings and W/C multilayers. The goal of the development of x-ray mirrors is to optimize the deposition conditions in order to control the thickness of a single layer or the lateral period of a multilayer, and to achieve high reflectivity over the whole deposition length according to the application.

[1]  K. Tiedtke,et al.  Sub-nm accuracy metrology for ultra-precise reflective X-ray optics , 2011 .

[2]  Liubov Samoylova,et al.  Conceptual Design Report: X-Ray Optics and Beam Transport , 2011 .

[3]  A. Ulyanenkov Novel methods and universal software for HRXRD, XRR and GISAXS data interpretation , 2006 .

[4]  Frank Siewert,et al.  Single-layer mirrors for advanced research light sources , 2010 .

[5]  P. Bogdanovich,et al.  Atomic Data and Nuclear Data Tables , 2013 .

[6]  J. Gaudin,et al.  Picosecond time-resolved x-ray refectivity of a laser-heated amorphous carbon film , 2011 .

[7]  B. L. Henke,et al.  X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 , 1993 .

[8]  James C. Wyant,et al.  White light interferometry , 2002, SPIE Defense + Commercial Sensing.

[9]  D. Attwood Soft X-Rays and Extreme Ultraviolet Radiation , 1999 .

[10]  Eric M. Gullikson,et al.  Development, characterization and experimental performance of x-ray optics for the LCLS free-electron laser , 2008, Optical Engineering + Applications.

[11]  H. Wabnitz,et al.  The soft x-ray free-electron laser FLASH at DESY: beamlines, diagnostics and end-stations , 2009 .

[12]  Frank Siewert,et al.  Single-layer and multilayer mirrors for current and next-generation light sources , 2008, Optical Engineering + Applications.

[13]  Giovanni Sostero,et al.  A hybrid active optical system for wave front preservation and variable focal distance , 2010 .

[14]  Eric M. Gullikson,et al.  Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors , 2009, Optics + Optoelectronics.

[15]  Sébastien Boutet,et al.  The Coherent X-ray Imaging (CXI) instrument at the Linac Coherent Light Source (LCLS) , 2010 .

[16]  H. Sinn,et al.  Coherence properties of the European XFEL , 2010 .

[17]  David L. Windt,et al.  IMD—software for modeling the optical properties of multilayer films , 1998 .

[18]  Damage threshold of amorphous carbon mirror for 177 eV FEL radiation , 2011 .

[19]  J. Chalupský,et al.  Damage of amorphous carbon induced by soft x-ray femtosecond pulses above and below the critical angle , 2009 .