Quantitative depth profile analysis by glow discharge

Abstract The development of dc glow discharge spectrometry for depth profile analysis is reviewed. Different approaches to quantification of depth profile measurements into elemental concentrations vs depth are discussed. Methods for quantitative glow discharge optical emission spectrometry (GD-OES), based on the concept of emission yield (emission intensity/sputtered weight), are described in detail. The alternative quantification method developed at the Swedish Institute for Metals Research, which also incorporates compensation for variations in excitation parameters, is presented. Current work on GD mass spectrometry (GD-MS) for quantitative depth profile analysis is briefly reviewed. Several applications of quantitative GD spectrometry to metallic and non-metallic surface layers are presented. Some of the remaining problem areas with regard to quantification are discussed; reference materials, accuracy of the depth determination, influence of released gaseous species, and correction for background signals.

[1]  K. Koch,et al.  Versuche zur quantitativen Tiefenprofilanalyse von Stahloberflächen durch Emissionsspektrometrie mit der Glimmlampe , 1983 .

[2]  A. Eklund,et al.  Further improvements in calibration techniques for depth profiling with glow discharge optical emission spectrometry , 1990 .

[3]  D. Hall,et al.  Quantitative depth profiling by glow discharge mass spectrometry , 1988 .

[4]  J. M. Whelan,et al.  Glow‐discharge optical spectroscopy for the analysis of thin films , 1973 .

[5]  J. Charbonnier,et al.  Quantitative surface analysis by glow discharge optical spectrometry , 1986 .

[6]  J. Charbonnier,et al.  Comparative study of ion implantation profiles in metals , 1984 .

[7]  D. G. Jones,et al.  Fundamental parameters in quantitative depth profiling and bulk analysis with glow discharge spectrometry , 1993 .

[8]  P. Boumans.  Sputtering in a glow discharge for spectrochemical analysis , 1972 .

[9]  R. Berneron.  L'analyse des surfaces métalliques par spectrométrie d'émission à décharge luminescente , 1978 .

[10]  W. Grimm.  Eine neue glimmentladungslampe für die optische emissionsspektralanalyse , 1968 .

[11]  R. K. Marcus,et al.  Radio frequency powered glow discharge atomization/ionization source for solids mass spectrometry , 1989 .

[12]  J. Johnson,et al.  In-Depth Compositional Profile Analysis of Alloys Using Optical Emission Glow Discharge Spectrography , 1973 .

[13]  A. Bengtson.  A contribution to the solution of the problem of quantification in surface analysis work using glow discharge atomic emission spectroscopy , 1985 .

[14]  J. Charbonnier,et al.  Surface analysis by glow discharge , 1981 .

[15]  H. Human,et al.  A study of the density of sputtered atoms in the plasma of the modified Grimm-type glow discharge source , 1981 .