论文信息 - Using design based binning to improve defect excursion control for 45nm production

Using design based binning to improve defect excursion control for 45nm production

For advanced device (45 nm and below), we proposed a novel method to monitor systematic and random excursion. By integrating design information and defect inspection results into automated software (DBB), we can identify design/process marginality sites with defect inspection tool. In this study, we applied supervised binning function (DBC) and defect criticality index (DCI) to identify systematic and random excursion problems on 45 nm SRAM wafers. With established SPC charts, we will be able to detect future excursion problem in manufacturing line early.

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