论文信息 - High sensitivity, GHz operating SAW pressure sensor structures manufactured by micromachining and nano-processing of GaN/Si - 字舞流文

High sensitivity, GHz operating SAW pressure sensor structures manufactured by micromachining and nano-processing of GaN/Si

G. Konstantinidis | A. Dinescu | A. Muller | A. Stavrinidis | A. Stefanescu | G. Stavrinidis | I. Giangu | A. Pantazis | G. Boldeiu