Inverse-designed photonics for semiconductor foundries

Silicon photonics is becoming a leading technology in photonics, displacing traditional fiber optic transceivers in long-haul and intra-data-center links and enabling new applications such as solid-state LiDAR (Light Detection and Ranging) and optical machine learning. Further improving the density and performance of silicon photonics, however, has been challenging, due to the large size and limited performance of traditional semi-analytically designed components. Automated optimization of photonic devices using inverse design is a promising path forward but has until now faced difficulties in producing designs that can be fabricated reliably at scale. Here we experimentally demonstrate four inverse-designed devices - a spatial mode multiplexer, wavelength demultiplexer, 50-50 directional coupler, and 3-way power splitter - made successfully in a commercial silicon photonics foundry. These devices are efficient, robust to fabrication variability, and compact, with footprints only a few micrometers across. They pave the way forward for the widespread practical use of inverse design.

[1]  Alexander Y. Piggott,et al.  Inverse design and demonstration of a compact and broadband on-chip wavelength demultiplexer , 2015, Nature Photonics.

[2]  Seppo Honkanen,et al.  Integration of atomic layer deposited nanolaminates on silicon waveguides (Conference Presentation) , 2016, Photonics Europe.

[3]  Ole Sigmund,et al.  Topology optimization for nano‐photonics , 2011 .

[4]  Michael R. Watts,et al.  Large-scale nanophotonic phased array , 2013, Nature.

[5]  Eli Yablonovitch,et al.  Inverse design of near unity efficiency perfectly vertical grating couplers. , 2017, Optics express.

[6]  David Sell,et al.  Large-Angle, Multifunctional Metagratings Based on Freeform Multimode Geometries. , 2017, Nano letters.

[7]  Steven G. Johnson,et al.  Notes on Adjoint Methods for 18.335 , 2012 .

[8]  Alexander Y. Piggott,et al.  Inverse design and demonstration of a compact on-chip narrowband three-channel wavelength demultiplexer , 2017, 1709.08809.

[9]  Steven A. Miller,et al.  512-Element Actively Steered Silicon Phased Array for Low-Power LIDAR , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[10]  Alan Y. Liu,et al.  Heterogeneous Silicon Photonic Integrated Circuits , 2016, Journal of Lightwave Technology.

[11]  Niles A. Pierce,et al.  An Introduction to the Adjoint Approach to Design , 2000 .

[12]  Eli Yablonovitch,et al.  Adjoint shape optimization applied to electromagnetic design. , 2013, Optics express.

[13]  Ronald Fedkiw,et al.  Level set methods and dynamic implicit surfaces , 2002, Applied mathematical sciences.

[14]  Steven G. Johnson,et al.  Robust design of slow-light tapers in periodic waveguides , 2009 .

[15]  Roel Baets,et al.  Open-Access Silicon Photonics: Current Status and Emerging Initiatives , 2018, Proceedings of the IEEE.

[16]  Christopher T. DeRose,et al.  Improved broadband performance of an adjoint shape optimized waveguide crossing using a Levenberg-Marquardt update. , 2019, Optics express.

[17]  Dries Vercruysse,et al.  Inverse-designed diamond photonics , 2018, Nature Communications.

[18]  Alexander Y. Piggott,et al.  Fabrication-constrained nanophotonic inverse design , 2016, Scientific Reports.

[19]  Douglas D. Coolbaugh,et al.  The AIM Photonics MPW: A Highly Accessible Cutting Edge Technology for Rapid Prototyping of Photonic Integrated Circuits , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[20]  Ole Sigmund,et al.  Topology optimized mode multiplexing in silicon-on-insulator photonic wire waveguides. , 2016, Optics express.

[21]  Jelena Vucković,et al.  Inverse design in nanophotonics , 2018, Nature Photonics.

[22]  Winfried Kaiser,et al.  Semiconductor fabrication: Pushing deep ultraviolet lithography to its limits , 2007 .

[23]  N. Gauger,et al.  Sensitivity analysis and optimization of sub-wavelength optical gratings using adjoints. , 2014, Optics express.

[24]  Shanhui Fan,et al.  Accelerated solution of the frequency-domain Maxwell's equations by engineering the eigenvalue distribution of the operator. , 2013, Optics express.

[25]  Jesse Lu,et al.  Nanophotonic computational design. , 2013, Optics express.

[26]  Ali Hajimiri,et al.  Binary particle swarm optimized 2  ×  2 power splitters in a standard foundry silicon photonic platform. , 2016, Optics letters.

[27]  Graham T. Reed,et al.  Silicon Photonics: The State of the Art , 2008 .

[28]  Shanhui Fan,et al.  Choice of the perfectly matched layer boundary condition for iterative solvers of the frequency-domain Maxwell's equations , 2012, Other Conferences.