论文信息 - Control of Composition Profile in Mercury Cadmium Telluride Films Prepared by Isothermal Vapor Phase Epitaxy

Control of Composition Profile in Mercury Cadmium Telluride Films Prepared by Isothermal Vapor Phase Epitaxy

Hg 1-x Cd x Te (MCT) films were grown by using three kinds of source materials on conventional open tube isothermal vapor phase epitaxy. The composition proble was dependent on the source materials: HgTe and sintered MCT sources resulted low x thick film and high x thin film, respectively. By considering these effects, the mixture sources of HgTe and CdTe enabled to produce the films of flat composition profile with x0.2 and thickness of 10 μm

N. Takeuchi | Y. Furukawa | Y. Noda | H. Kobayashi

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