Design for manufacturability of a VDSM standard cell library

This paper presents a method of designing a 65 nm DFM standard cell library. By reducing the amount of the library largely, the process of optical proximity correction (OPC) becomes more efficient and the need for large storage is reduced. This library is more manufacture-friendly as each cell has been optimized according to the DFM rule and optical simulation. The area penalty is minor compared with traditional library, and the timing, as well as power has a good performance. Furthermore, this library has passed the test from the Technology Design Department of Foundry. The result shows this DFM standard cell library has advantages that improve the yield.

[1]  Savithri Sundareswaran,et al.  A sensitivity-aware methodology to improve cell layouts for DFM guidelines , 2011, 2011 12th International Symposium on Quality Electronic Design.

[2]  Hyo-Sig Won,et al.  DFM optimization of standard cells considering random and systematic defect , 2008, 2008 International SoC Design Conference.

[3]  Fook-Luen Heng,et al.  Merits of cellwise model-based OPC , 2004, SPIE Advanced Lithography.

[4]  Nguyen Minh Duc,et al.  Compact yet high-performance (CyHP) library for short time-to-market with new technologies , 2000, Proceedings 2000. Design Automation Conference. (IEEE Cat. No.00CH37106).

[5]  Ilaria De Munari,et al.  Performance-Effective Compaction of Standard-Cell Libraries for Digital Design , 2009, 2009 12th Euromicro Conference on Digital System Design, Architectures, Methods and Tools.

[6]  Lan Chen,et al.  Cellwise OPC Based on Reduced Standard Cell Library , 2008, ISQED 2008.

[7]  J. Khare,et al.  Manufacturability analysis of standard cell libraries , 1998, Proceedings of the IEEE 1998 Custom Integrated Circuits Conference (Cat. No.98CH36143).

[8]  J. Andres Torres,et al.  Unified process aware system for circuit layout verification , 2007, SPIE Advanced Lithography.

[9]  Robert C. Aitken,et al.  DFM metrics for standard cells , 2006, 7th International Symposium on Quality Electronic Design (ISQED'06).