Monolithic fringe-field-activated crystalline silicon tilting-mirror devices
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J. E. Bower | Dan M. Marom | Chorng-Ping Chang | Hyongsok T. Soh | Fred P. Klemens | T. W. Sorsch | W. Lai | T. Sorsch | H. Soh | D. Greywall | D. Marom | Sang‐Hyun Oh | C. Pai | F. Klemens | J. Bower | R. Cirelli | Sang Hyun Oh | Joseph Ashley Taylor | D. S. Greywall | P. A. Busch | R. Cirelli | Chorng-Ping Chang | Chien-Shing Pai | Warren Y.-C. Lai | J. A. Taylor | P. Busch
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