论文信息 - Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone - 字舞流文

Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone

Y. Chabal | R. Pearlstein | L. F. Peña | A. Derecskei-Kovacs | A. Mallikarjunan | H. Chandra | Manchao Xiao | X. Lei | Charith E Nanayakkara