论文信息 - Novel high temperature metal organic chemical vapor deposition vertical rotating-disk reactor with multizone heating for GaN and related materials - 字舞流文

Novel high temperature metal organic chemical vapor deposition vertical rotating-disk reactor with multizone heating for GaN and related materials

A. Thompson | A. Gurary | R. Stall | P. Zawadzki | N. Schumaker | T. Salagaj | C. Yuan | K. Moy | R. Walker | W. J. Krolla

[1] G. Tompa,et al. Thermal and flow issues in the design of metalorganic chemical vapor deposition reactors , 1994 .

[2] Shahryar Motakef,et al. Flow regime map and deposition rate uniformity in vertical rotating-disk OMVPE reactors , 1992 .

[3] William G. Breiland,et al. Design and Verification of Nearly Ideal Flow and Heat Transfer in a Rotating Disk Chemical Vapor Deposition Reactor , 1991 .

[4] Klavs F. Jensen,et al. Complex flow phenomena in vertical MOCVD reactors: Effects on deposition uniformity and interface abruptness , 1987 .

[5] Ralph Greif,et al. EFFECTS OF BOUNDARY CONDITIONS ON THE FLOW AND HEAT TRANSFER IN A ROTATING DISK CHEMICAL VAPOR DEPOSITION REACTOR , 1987 .