A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.

[1]  Hyung-Jo Jung,et al.  Broadband energy-harvesting using a two degree-of-freedom vibrating body , 2011 .

[2]  Yaowen Yang,et al.  A multiple-degree-of-freedom piezoelectric energy harvesting model , 2012 .

[3]  Chengkuo Lee,et al.  Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers , 2012 .

[4]  Ann Marie Sastry,et al.  Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems , 2008 .

[5]  J. C. Park,et al.  Micro-fabricated lead zirconate titanate bent cantilever energy harvester with multi-dimensional operation , 2013 .

[6]  Jung-Hyun Park,et al.  Comparison of MEMS PZT Cantilevers Based on $d_{31}$ and $d_{33}$ Modes for Vibration Energy Harvesting , 2013, Journal of Microelectromechanical Systems.

[7]  C. K. Lee,et al.  Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film , 2009 .

[8]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[9]  Franz Laermer,et al.  Deep reactive ion etching , 2020, Handbook of Silicon Based MEMS Materials and Technologies.

[10]  Einar Halvorsen,et al.  A piezoelectric energy harvester with a mechanical end stop on one side , 2010, 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP).

[11]  Noureddine Bouhaddi,et al.  Nonlinear dynamics of magnetically coupled beams for multi-modal vibration energy harvesting , 2016, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[12]  Ehab F. El-Saadany,et al.  A wideband vibration-based energy harvester , 2008 .

[13]  Paul Muralt,et al.  Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films , 1999 .

[14]  Walied A. Moussa,et al.  Investigation of folded spring structures for vibration-based piezoelectric energy harvesting , 2014 .

[15]  Neil D. Sims,et al.  Promoting Access to White Rose Research Papers Energy Harvesting from the Nonlinear Oscillations of Magnetic Levitation , 2022 .

[16]  Peter Enoksson,et al.  Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors , 2001 .

[17]  F. Costa,et al.  P2E-3 Power Harvesting Using Piezoelectric MEMS Generator with Interdigital Electrodes , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[18]  Juan Manuel Cueva Lovelle,et al.  A review about Smart Objects, Sensors, and Actuators , 2017, Int. J. Interact. Multim. Artif. Intell..

[19]  Chengkuo Lee,et al.  Electromagnetic energy harvesting from vibrations of multiple frequencies , 2009 .

[20]  Noureddine Bouhaddi,et al.  Enhancement of the performance of a hybrid nonlinear vibration energy harvester based on piezoelectric and electromagnetic transductions , 2014 .

[21]  Tuna Balkan,et al.  An electromagnetic micro energy harvester based on an array of parylene cantilevers , 2009 .

[22]  Mohamed Lamjed Bouazizi,et al.  Multi-modal vibration energy harvesting approach based on nonlinear oscillator arrays under magnetic levitation , 2016 .

[23]  Peter Enoksson,et al.  Smart design selftuning piezoelectric energy harvester intended for gas turbines , 2015 .

[24]  Toshihiro Itoh,et al.  S-shape spring sensor: Sensing specific low-frequency vibration by energy harvesting. , 2016, Review of Scientific Instruments.

[25]  Danick Briand,et al.  The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film , 2011 .

[26]  Hao Wu,et al.  Development of a broadband nonlinear two-degree-of-freedom piezoelectric energy harvester , 2014 .

[27]  Peter Enoksson,et al.  Modelling and experimental verification of more efficient power harvesting by coupled piezoelectric cantilevers , 2014 .

[28]  Hua Yu,et al.  A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit , 2014, Sensors.

[29]  Skandar Basrour,et al.  Vibration Energy Harvesting with PZT Micro Device , 2009 .

[30]  Daniel J. Inman,et al.  An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations , 2009 .

[31]  Emiliano Rustighi,et al.  Design of a 2DOF Vibrational Energy Harvesting Device , 2011 .

[32]  Yaowen Yang,et al.  A novel two-degrees-of-freedom piezoelectric energy harvester , 2013 .

[33]  B. Mann,et al.  Nonlinear dynamics for broadband energy harvesting: Investigation of a bistable piezoelectric inertial generator , 2010 .