Gas‐Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

[1]  G. Whitesides,et al.  New approaches to nanofabrication: molding, printing, and other techniques. , 2005, Chemical reviews.

[2]  Satoshi Takei.  Eco-friendly step-and-flash imprint lithography using ultraviolet-curing liquid material with lactulose derivative derived from medicinal drugs for biomicrochips , 2014 .

[3]  Satoshi Takei,et al.  Eco-friendly, water-repellent, light-transparent film derived from psicose using nanoimprint lithography , 2015 .

[4]  Wilhelm T. S. Huck,et al.  Ordered block-copolymer assembly using nanoimprint lithography , 2004 .

[5]  L. Guo,et al.  Large area high density sub-20 nm SiO(2) nanostructures fabricated by block copolymer template for nanoimprint lithography. , 2009, ACS nano.

[6]  Satoshi Takei,et al.  Ultraviolet Nano Imprint Lithography Using Fluorinated Silicon-Based Resist Materials , 2010 .

[7]  Jian-guo Tang,et al.  Preparation of a highly permeable ordered porous microfiltration membrane of brominated poly(phenylene oxide) on an ice substrate by the breath figure method , 2012 .

[8]  Changsheng Yuan,et al.  High resolution soft mold for UV-curing nanoimprint lithography using an oxygen insensitive degradable material , 2014 .

[9]  Jin Sung Kim,et al.  Nanoimprint Lithography Based Approach for the Fabrication of Large‐Area, Uniformly‐Oriented Plasmonic Arrays , 2008 .

[10]  Takahiro Kozawa,et al.  Eco-friendly electron beam lithography using water-developable resist material derived from biomass , 2012 .

[11]  Shoso Shingubara,et al.  Fabrication of Nanomaterials Using Porous Alumina Templates , 2003 .

[12]  Satoshi Takei.  Step and Flash Nano Imprint Lithography of 80 nm Dense Line Pattern Using Trehalose Derivative Resist Material , 2010 .

[13]  Satoshi Takei,et al.  Inedible cellulose-based biomass resist material amenable to water-based processing for use in electron beam lithography , 2015 .

[14]  Ryan Deschner,et al.  Reduction of pattern peeling in step-and-flash imprint lithography , 2014 .

[15]  Hyoung Gil Choi,et al.  Large area pattern replication by nanoimprint lithography for LCD-TFT application , 2009 .

[16]  A. Pisano,et al.  Simultaneous patterning of nanoparticles and polymers using an evaporation driven flow in a vapor permeable template. , 2012, Langmuir : the ACS journal of surfaces and colloids.

[17]  Frances A. Houle,et al.  Adhesion between template materials and UV-cured nanoimprint resists , 2007 .

[18]  P M Ferreira,et al.  Direct metal nano-imprinting using an embossed solid electrolyte stamp. , 2011, Nanotechnology.

[19]  Satoshi Takei,et al.  Ultraviolet nanoimprint lithography using cyclodextrin-based porous template for pattern failure reduction , 2015 .

[20]  P. Weiss,et al.  Sub-30-nm patterning on quartz for imprint lithography templates , 2008 .

[21]  L. Guo,et al.  Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting. , 2009, ACS nano.

[22]  C. Grant Willson,et al.  Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography , 2013 .

[23]  A. Miahnahri,et al.  Polyvinyl alcohol templates for low cost, high resolution, complex printing , 2004 .

[24]  C. Perret,et al.  Characterization of 8-in. wafers printed by nanoimprint lithography , 2004 .

[25]  Dae-Geun Choi,et al.  Fluorinated organic-inorganic hybrid mold as a new stamp for nanoimprint and soft lithography. , 2005, Langmuir : the ACS journal of surfaces and colloids.

[26]  Zhaoning Yu,et al.  Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff , 2003 .

[27]  Michael D. Stewart,et al.  Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography , 1999 .

[28]  Xiaogan Liang,et al.  Sub-10 nm nanofabrication via nanoimprint directed self-assembly of block copolymers. , 2011, ACS nano.

[29]  Hea-Yeon Lee,et al.  Replica mold for nanoimprint lithography from a novel hybrid resin. , 2009, Langmuir : the ACS journal of surfaces and colloids.

[30]  Atsushi Sekiguchi,et al.  Ecofriendly antiglare film derived from biomass using ultraviolet curing nanoimprint lithography for high-definition display , 2013 .

[31]  William J. Dauksher,et al.  Imprint lithography for integrated circuit fabrication , 2003 .

[32]  James J. Watkins,et al.  Large-Area Printing of Optical Gratings and 3D Photonic Crystals Using Solution-Processable Nanoparticle/Polymer Composites , 2014 .