Optimized Design and Fabrication of Mach–Zehnder Interferometer Sensor in Polymer Technology

Abstract Without any external modulating facilities, through a precisely controlled sensing length of 11,515 μm, the integrated Mach–Zehnder interferometer sensor obtains a quadrature point and linear response in refractive index measuring range of 1.31–1.42 at the wavelength of 1,550 nm. Combined with structure optimization and surface treatment of sensing arm, the sensitivity is measured as 225.4 dB/RIU, and the sensing response time is less than 20 s to analyte solutions. Cost-efficient polymers are used as waveguide materials, and a microfluidic system is achieved.

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