Thermal Evolution of the Structure and Activity of Magnetron-Sputtered TM–C–N ( TM = Fe , Co ) Oxygen Reduction Catalysts

Thin-film libraries of TM x C 1-x-y N x (TM = Fe, Co; 0 < x < 0.09; 0 < y < 0.5) have been prepared by combinatorial sputter deposition. The libraries were subsequently annealed at 700-1000°C to induce structural and compositional changes. Using grazing-incidence X-ray diffraction and scanning electron microscopy, structural changes were followed as a function of annealing temperature. At temperatures above 700°C, the previously homogeneous and amorphous thin films became a heterogeneous mixture of (partially) graphitized nitrogen-containing carbon and either Fe 3 C or β-Co. The onset of this transformation is accompanied by a rapid decrease in N content and occurs as a function of both transition metal content and temperature. Catalytic activity for oxygen reduction is at its maximum partway through this transformation.

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