论文信息 - A new version of sputter ion source utilizing an ionizer of platinum plate - 字舞流文

A new version of sputter ion source utilizing an ionizer of platinum plate

H. Yamaguchi | M. Yamanouchi | Y. Higashi | Mitsuharu Okamoto

[1] G. Doucas,et al. The brightness and emittance of the negative ion beam emitted by a middleton sputter source , 1974 .

[2] R. Middleton,et al. A close to universal negative ion source , 1974 .

[3] J. H. Westbrook,et al. Ion Beams with Applications to Ion Implantation , 1973 .