Investigation of a 1-DOF piezoelectric micro-positioning rotary stage

Abstract Electromagnetic motors are extensively used as actuators for high-precision rotary positioning applications; however, they can no longer satisfy continuously increasing new technical requirements, including (but not limited to) those for compactness, simple structures, high precision, and low manufacturing costs. A continuous study of a 1-DOF piezoelectric micro-positioning rotary stage, which was previously proposed by the authors and is characterised by the aforementioned criteria, is reported in this paper. The rotary stage is driven by the interaction between a cylinder-type piezoelectric transducer and a rotor, utilising resonant ultrasonic standing-wave vibrations. The results demonstrate an acceptable correspondence between the detailed numerical and experimental harmonic and modal analyses of the piezoelectric cylinder. Investigations of the motion trajectories of the contact zones and driving tips in the XZ plane indicate the suitability of the selected operational vibration mode to provide a well-defined motion of the rotary stage. The average resolution of the rotary stage is determined to be 0.25 μrad and 0.26 μrad in the clockwise and anticlockwise direction, respectively.

[1]  Yingxiang Liu,et al.  A square-type rotary ultrasonic motor with four driving feet , 2012 .

[2]  Minyue Fu,et al.  Design and Control of a Rotary Dual-Stage Actuator Positioning System ✩ , 2011 .

[3]  Ramutis Bansevicius,et al.  Ultrasonic standing waves-driven high resolution rotary table , 2016 .

[4]  Weishan Chen,et al.  A cylindrical traveling wave ultrasonic motor using bonded-type composite beam. , 2016, Ultrasonics.

[5]  Chao-Chieh Lan,et al.  Optimal design of rotary manipulators using shape memory alloy wire actuated flexures , 2009 .

[6]  G. L. Smith,et al.  Integrated thin-film piezoelectric traveling wave ultrasonic motors , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[7]  Yingxiang Liu,et al.  A rotary piezoelectric motor using bending vibrators , 2013 .

[8]  Mihai Budescu,et al.  Penalty Based Algorithms for Frictional Contact Problems , 2011 .

[9]  Yoshikazu Arai,et al.  A linear-rotary stage for precision positioning , 2010 .

[10]  Lin Yang,et al.  A novel dual stator-ring rotary ultrasonic motor , 2013 .

[11]  Jian Wang,et al.  A review of long range piezoelectric motors using frequency leveraged method , 2015 .

[12]  Siyuan He,et al.  A single vibration mode tubular piezoelectric ultrasonic motor , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[13]  Xiaoyan Hou,et al.  Development and numerical characterization of a new standing wave ultrasonic motor operating in the 30-40kHz frequency range. , 2013, Ultrasonics.