rf ion source development for neutron generation and for material modification

rf driven multicusp ion sources have been successfully used in various different applications. Lately the Plasma and Ion Source Technology Group at Lawrence Berkeley National Laboratory has been developing a rf ion source for neutron production and a high current density cw-operated ion source for SIMOX (Separation by Implantation of Oxygen)-application. The group has developed a small ion source, which consists of a quartz plasma chamber, an external rf-antenna, an extraction electrode, and a target assembly, all in a tube that is approximately 25 cm in length and 5 cm in diameter. Another neutron generator currently under development is a multiaperture, high power generator. The neutron generator currently operates at 1% duty cycle, 80 kV, and 150 mA of deuterium beam. The neutron yield measured from the generator is 1.6×107 n/s. For oxygen implantation, the group has been developing a source which could provide a high percentage of O+ at high current density using cw operation. A dual-antenna has been ...