Spectroscopic Characterization Techniques for Semiconductor Technology V

These proceeding contain 29 chapters. The topics discussed are: Modulation spectroscopy; Ion-implanted CdTe photoreflectivity; bandgap shrinkage in silicon solar cells; ellipsometry, reflectance and transmission; gallium arsenides heterostructures; superlattices characterization; Raman scattering and photoluminence; reactive ion etching of MBE GaAs; Photoluminescence of InGaAlAs quaternary alloys; and structural and chemical characterization of dielectric films.