Thickness Dependence of Structural, Electrical and Optical Properties of Sputter Deposited Indium Tin Oxide Films

1Department of Physics, Anna University, Trichy 620 024, India 2Department of Physics, National Institute of Technology, Trichy 620 015, India 3School of Physics, Alagappa University, Karaikudi 630 003, India 4ECMS Division, Central Electrochemical Research Institute (Council of Scientific and Industrial Research), Karaikudi 630 006, India 5School of Materials Science and Engineering, Nanyang Technological University, Singapore 639 798