Progress in Chip-Scale Photonic Sensing

Chip-scale integrated planar photonic sensing systems for portable diagnostics and monitoring are emerging, as photonic components are integrated into systems with silicon (Si), Si complementary metal-oxide semiconductor, and fluidics. This paper reviews progress in these areas. Medical and environmental applications, candidate photonic sensors, integration methodologies, integrated subsystem demonstrations, and challenges facing this emerging field are discussed in this paper.

[1]  Naoki Matsuda,et al.  A design for improving the sensitivity of a Mach–Zehnder interferometer to chemical and biological measurands , 2002 .

[2]  A.S. Brown,et al.  High-speed large-area inverted InGaAs thin-film metal-semiconductor-metal photodetectors , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[3]  L.J. Guo,et al.  Polymer microring resonators for biochemical sensing applications , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[4]  James S. Wilkinson,et al.  Integrated optical Mach-Zehnder biosensor , 1998 .

[5]  Clifford L. Henderson,et al.  Multimode interferometric sensors on silicon optimized for fully integrated complementary-metal-oxide-semiconductor chemical-biological sensor systems , 2006 .

[6]  Larry R. Dalton,et al.  Fabrication and Replication of Polymer Integrated Optical Devices Using Electron-Beam Lithography and Soft Lithography † , 2004 .

[7]  Martin A. Brooke,et al.  Integrated detectors for embedded optical interconnections on electrical boards, modules, and integrated circuits , 2002 .

[8]  B. Buchanan,et al.  8 x 8 array of thin-film photodetectors vertically electrically interconnected to silicon circuitry , 1995, IEEE Photonics Technology Letters.

[9]  H. Heidrich,et al.  Optoelectronic/Photonic Integrated Circuits on InP between Technological Feasibility and Commercial Success , 2002 .

[10]  Lin Luan,et al.  Vertically Coupled Polymer Microdisk Resonators Fabricated by Photolithography Technique , 2007, 2007 Proceedings 57th Electronic Components and Technology Conference.

[11]  P. Dumais,et al.  Silica-on-silicon optical sensor based on integrated waveguides and microchannels , 2005, IEEE Photonics Technology Letters.

[12]  G. Roelkens,et al.  Thin-Film III-V Photodetectors Integrated on Silicon-on-Insulator Photonic ICs , 2007, Journal of Lightwave Technology.

[13]  R. Baets,et al.  Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. , 2007, Optics express.

[14]  S.J.B. Yoo,et al.  Monolithically integrated InP-based photonic chip development for O-CDMA systems , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[15]  John E. Bowers,et al.  Hybrid silicon integration , 2009 .

[16]  N.M. Jokerst,et al.  A thin-film laser, polymer waveguide, and thin-film photodetector cointegrated onto a silicon substrate , 2005, IEEE Photonics Technology Letters.

[17]  Andrew J. deMello,et al.  Thin-film organic photodiodes as integrated detectors for microscale chemiluminescence assays , 2005 .

[18]  Sang-Yeon Cho,et al.  Strain Compensated InGaAs/GaAsP Single Quantum Well Thin Film Lasers Integrated onto Si Substrates , 2007, LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings.

[19]  Heinrich Kurz,et al.  Ultrahigh-quality-factor silicon-on-insulator microring resonator. , 2004, Optics letters.

[20]  Dae-Ik Kim,et al.  An interferometric sensor for integration with Si CMOS signal processing circuitry: "Sensor on a chip" , 2004, Conference on Lasers and Electro-Optics, 2004. (CLEO)..

[21]  Larry R. Dalton,et al.  Polymer micro-ring filters and modulators , 2002 .

[22]  N.M. Jokerst,et al.  Chip scale integration of optical microresonator sensors with digital microfludics systems , 2008, LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society.

[23]  Ofer Levi,et al.  Monolithically integrated semiconductor fluorescence sensor for microfluidic applications , 2005 .

[24]  Sang-Yeon Cho,et al.  Top-Bottom Stripe Thin Film InGaAs/GaAsP Laser integrated on Silicon , 2008, 2008 Device Research Conference.

[25]  Chi Fan,et al.  Heterogeneous integration of optoelectronic components , 1997, Photonics West.

[26]  G. Roelkens,et al.  Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding , 2005, Journal of Lightwave Technology.

[27]  Hyoung J. Cho,et al.  Development of planar waveguide based integrated optic SPR (Surface Plasmon Resonance) sensor array , 2007, 2007 Quantum Electronics and Laser Science Conference.

[28]  William S. Wong,et al.  Damage-free separation of GaN thin films from sapphire substrates , 1998 .

[29]  Kathleen Richardson,et al.  Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor. , 2007, Optics express.

[30]  Konstantinos Misiakos,et al.  A bioanalytical microsystem for protein and DNA sensing based on a monolithic silicon optoelectronic transducer , 2005 .

[31]  H. Melchior,et al.  Optical receiver array in silicon bipolar technology with selfaligned, low parasitic III/V detectors for DC-1 Gbit/s parallel links , 1991 .

[32]  D. Gill,et al.  Optical sensing of biomolecules using microring resonators , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[33]  Ivo Rendina,et al.  Advances in silicon-on-insulator optoelectronics , 1998 .

[34]  Siegfried R. Waldvogel,et al.  Fiber optic evanescent field sensor for detection of explosives and CO2 dissolved in water , 2008 .

[35]  R. J. Deri,et al.  Monolithic integration of optical waveguide circuitry with III-V photodetectors for advanced lightwave receivers , 1993 .

[36]  Sang-Yeon Cho,et al.  Embedded optical interconnections on printed wiring boards , 2003, 53rd Electronic Components and Technology Conference, 2003. Proceedings..

[37]  V Chu,et al.  An on-chip thin film photodetector for the quantification of DNA probes and targets in microarrays. , 2004, Nucleic acids research.

[38]  C. Camperi-Ginestet,et al.  Alignable epitaxial liftoff of GaAs materials with selective deposition using polyimide diaphragms , 1991, IEEE Photonics Technology Letters.

[39]  Anatolii N Oraevsky,et al.  Whispering-gallery waves , 2002 .

[40]  Sang-Woo Seo,et al.  A 10 Gbit/s Si CMOS transimpedance amplifier with an integrated MSM photodetector for optical interconnections , 2004, The 17th Annual Meeting of the IEEELasers and Electro-Optics Society, 2004. LEOS 2004..

[41]  Larry A. Coldren,et al.  Sensitivity and scattering in a monolithic heterodyned laser biochemical sensor , 2003 .

[42]  Radoslaw Mazurczyk,et al.  A novel concept of the integrated fluorescence detection system and its application in a lab-on-a-chip microdevice , 2006 .

[43]  N. Jokerst,et al.  3-D stacked thin-film photodetectors for multispectral detection applications , 2003, IEEE Photonics Technology Letters.

[44]  Sang-Yeon Cho,et al.  Surface Customized Optical Microresonator Sensors for Integrated Chip-Scale Portable Sensing Applications , 2007, 2007 IEEE Sensors.

[45]  Ray T. Chen,et al.  Performance analysis of 10-/spl mu/m-thick VCSEL array in fully embedded board level guided-wave optoelectronic interconnects , 2003 .

[46]  S. Blair,et al.  Enhanced fluorescence transduction properties of metallic nanocavity arrays , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[47]  In-Dal Song,et al.  Multi-Gbit/s CMOS Transimpedance Amplifier with Integrated Photodetector for Optical Interconnects , 2004 .

[48]  Scott Blackstone Recent advances in wafer bonding of silicon and alternative materials , 1999 .

[49]  Sang-Yeon Cho,et al.  Optical Microring Resonator Sensors with Selective Membrane Surface Customization , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[50]  Xudong Fan,et al.  Advances in optical ring resonator based bio/chemical sensing , 2008, LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society.

[51]  Kerry J Vahala,et al.  Replica-molded high-Q polymer microresonators. , 2004, Optics letters.

[52]  Anne Mills,et al.  Conquering the intolerable burden of malaria: what's new, what's needed: a summary. , 2004, The American journal of tropical medicine and hygiene.

[53]  Gavin Sinclair,et al.  Characterisation of spatial and temporal changes in pH gradients in microfluidic channels using optically trapped fluorescent sensors. , 2006, Lab on a chip.

[54]  Nan Marie Jokerst,et al.  Chip scale integrated microresonators for sensing applications , 2008, SPIE LASE.

[55]  O. Vendier,et al.  Thin-film inverted MSM photodetectors , 1996, IEEE Photonics Technology Letters.

[56]  J. Bowers,et al.  Wafer fusion: materials issues and device results , 1997 .

[57]  N. Kernevez,et al.  Transfers of 2-inch GaN films onto sapphire substrates using Smart Cut/sup TM/ technology , 2005 .

[58]  Martin A. Brooke,et al.  Optical interconnections on electrical boards using embedded active optoelectronic components , 2003 .

[59]  B. Ghyselen,et al.  QuaSiC Smart-Cut® Substrates for SiC High Power Devices , 2002 .

[60]  Karan V. I. S. Kaler,et al.  Hybrid Integration of an Active Pixel Sensor and Microfluidics for Cytometry on a Chip , 2007, IEEE Transactions on Circuits and Systems I: Regular Papers.

[61]  Martin A. Brooke,et al.  Thin-film multimaterial optoelectronic integrated circuits , 1996 .

[62]  S. Kanakaraju,et al.  Laterally coupled InP-based single-mode microracetrack notch filter , 2003, IEEE Photonics Technology Letters.

[63]  G. Roelkens,et al.  Heterogeneous Integration of III-V Photodetectors and Laser Diodes on Silicon-on-Insulator Waveguide Circuits , 2006, 3rd IEEE International Conference on Group IV Photonics, 2006..

[64]  Bernard Aspar,et al.  Smart-Cut® process using metallic bonding: Application to transfer of Si, GaAs, InP thin films , 1999 .

[65]  E. Jalaguier,et al.  III–V layer transfer onto silicon and applications , 2005 .

[66]  Steven A. Ringel,et al.  Monolithic integration of III-V materials and devices on silicon , 1999, Photonics West.

[67]  Nan Marie Jokerst,et al.  InP/InGaAsP MQW thin film edge emitting lasers for embedded waveguide chip to chip optical interconnections , 2003, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003..

[68]  J.F. Snowdon,et al.  Solutions to optoelectronic packaging problems , 2005, CLEO/Europe. 2005 Conference on Lasers and Electro-Optics Europe, 2005..

[69]  M.A. Thomas,et al.  Data acquisition sensitivity determination of a sensor-on-a-chip integrated microsystem , 2004, Proceedings of IEEE Sensors, 2004..

[70]  J. Sachs,et al.  The economic burden of malaria. , 2001, The American journal of tropical medicine and hygiene.

[71]  G. Stemme,et al.  Low temperature full wafer adhesive bonding , 2001 .

[72]  Luke P. Lee,et al.  Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems , 2004 .

[73]  Sungyong Jung,et al.  3D stacked Si CMOS VLSI smart pixels using through-Si optoelectronic interconnections , 1998, 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369).

[74]  Jan Ingenhoff,et al.  A gas sensor based on an integrated optical Mach-Zehnder interferometer , 1992 .

[75]  Sang-Yeon Cho,et al.  A Polymer Microdisk Photonic Sensor Integrated Onto Silicon , 2006, IEEE Photonics Technology Letters.

[76]  Alan P. Morrison,et al.  Development of a microfluidic device for fluorescence activated cell sorting , 2002 .

[77]  Steve Blair,et al.  Microresonator-enhanced Raman amplification , 2006 .

[78]  K. Mayora,et al.  A new SU-8 process to integrate buried waveguides and sealed microchannels for a Lab-on-a-Chip , 2006 .

[79]  Nan Marie Jokerst,et al.  Integrated thin film InGaAsP laser and 1 x 4 polymer multimode interference splitter on silicon. , 2007, Optics letters.

[80]  David A. Chang-Yen,et al.  Design, fabrication, and packaging of a practical multianalyte-capable optical biosensor , 2006 .

[81]  L M Lechuga,et al.  Determination of carbaryl in natural water samples by a surface plasmon resonance flow-through immunosensor. , 2006, Biosensors & bioelectronics.

[82]  S. Yegnanarayanan,et al.  Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics. , 2007, Optics express.

[83]  C. Bridges,et al.  The annual impact of seasonal influenza in the US: measuring disease burden and costs. , 2007, Vaccine.

[84]  C.L. Schow,et al.  Ge-on-SOI-Detector/Si-CMOS-Amplifier Receivers for High-Performance Optical-Communication Applications , 2007, Journal of Lightwave Technology.

[85]  L. Mescia,et al.  Design of Planar Optic Sensors for Hydrocarbon Detection , 2004 .

[86]  Laura M. Lechuga,et al.  Microfluidic-optical integrated CMOS compatible devices for label-free biochemical sensing , 2006 .

[87]  K. Janiak,et al.  Monolithic integration of lasers, photodiodes, waveguides and spot size converters on GaInAsP/InP for photonic IC applications , 2000, Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials (Cat. No.00CH37107).

[88]  N A Mortensen,et al.  Photonic crystal resonator integrated in a microfluidic system. , 2008, Optics letters.

[89]  A. Matsko,et al.  Optical resonators with whispering-gallery modes-part I: basics , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[90]  Kazumi Wada,et al.  Monolithic Silicon Microphotonics , 2004 .

[91]  M. Bruel,et al.  Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding*1 , 1997 .

[92]  Jan Haisma,et al.  Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry historical review in a broader scope and comparative outlook , 2002 .

[93]  N.M. Jokerst,et al.  Integrated Optical Sensor in a Digital Microfluidic Platform , 2008, IEEE Sensors Journal.

[94]  Shigeo Fujita,et al.  Integration of GaN with Si using a AuGe-mediated wafer bonding technique , 2000 .

[95]  Sang-Yeon Cho,et al.  Polymer Microrings Integrated with Thin Film InGaAs MSM Photodetectors for Sensor-On-a-Chip Applications , 2006, 2006 International Conference on Indium Phosphide and Related Materials Conference Proceedings.

[96]  L. Maleki,et al.  Polymer optical waveguide vertically coupled to high-Q whispering gallery resonators , 2006, IEEE Photonics Technology Letters.

[97]  Chung-Yen Chao,et al.  Design and optimization of microring resonators in biochemical sensing applications , 2006, Journal of Lightwave Technology.

[98]  R. Soref,et al.  All-silicon active and passive guided-wave components for λ = 1.3 and 1.6 µm , 1986 .

[99]  S. Chu,et al.  A universal biosensing platform based on optical micro-ring resonators. , 2008, Biosensors & bioelectronics.

[100]  T. J. Kippenberg,et al.  Ultra-high-Q toroid microcavity on a chip , 2003, Nature.

[101]  Ki-Dong Lee,et al.  Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer layer , 2005 .

[102]  Yuze Sun,et al.  Sensitive optical biosensors for unlabeled targets: a review. , 2008, Analytica chimica acta.

[103]  A. Yariv Universal relations for coupling of optical power between microresonators and dielectric waveguides , 2000 .

[104]  Lin Luan,et al.  Optical Detection Heterogeneously Integrated With a Coplanar Digital Microfluidic Lab-on-a-Chip Platform , 2007, 2007 IEEE Sensors.

[105]  L. Wang,et al.  GaAs microcavity channel-dropping filter based on a race-track resonator , 1999, IEEE Photonics Technology Letters.

[106]  J Greve,et al.  Integration of microfluidics with a four-channel integrated optical Young interferometer immunosensor. , 2004, Biosensors & bioelectronics.

[107]  O. Vendier,et al.  A 155 Mbps digital transmitter using GaAs thin film LEDs bonded to silicon driver circuits , 1996, Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing.

[108]  P.-T. Ho,et al.  High-finesse laterally coupled single-mode benzocyclobutene microring resonators , 2004, IEEE Photonics Technology Letters.