Design of MEMS Low Range Micro-accelerometer

A new MEMS micro-accelerometer with low range was designed based on traditional bilateral four-beam micro-accelerometer.The new accelerometer has a measuring range of ±10 g.Model of the accelerometer structure was established,and stress,modal and shock-resistant capability were analyzed using ANSYS finite element software.Operating at 5 V supply power,the accelerometer had a theoretical sensitivity up to 1.029 mV/g,greatly improving sensitivity of the low-range micro-accelerometer,compared to the traditional structure.