论文信息 - Development of magnetic levitated stage for wide area movements

Development of magnetic levitated stage for wide area movements

This paper proposes a magnetic levitation system without other assistant devices that can move in wide area (< 300times300 mm2) as well as in high precision (< plusmn100 nm).

Jeong-Woo Jeon | Yong-Joo Kim | M. Caraiani | Sung-Shin Kim | Hyeon-Seok Oh

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