A simple through-only de-embedding method for on-wafer S-parameter measurements up to 110 GHz

The present paper proposes the simple deembedding method for 110-GHz on-wafer S-parameter measurements. While conventional de-embedding methods require two or more dummy patterns, our method only uses a through pattern and can perform accurate de-embedding up to 110 GHz. Differences among the proposed method and previous through-only de-embedding methods are that our method is available for various device under tests and higher frequencies.