Effects of $\hbox{Al}_{2}\hbox{O}_{3}$ Dielectric Cap and Nitridation on Device Performance, Scalability, and Reliability for Advanced High- $\kappa$/Metal Gate pMOSFET Applications
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T. Schram | V. Chang | L. Ragnarsson | M. Aoulaiche | T. Conard | S. Biesemans | S. De Gendt | H. Yu | K. Yin | J. Maes