论文信息 - Efficient reduced order modeling of fluid solid interactions for structurally complex perforated MEMS

Efficient reduced order modeling of fluid solid interactions for structurally complex perforated MEMS

This paper presents a resource- and time-efficient reduced order modeling (ROM) approach, which allows selective component-wise generation of system-level models for MEMS with high structural complexity. The fluid simulation is realized for perforated regions by means of an automatically generated, physics based lumped-flow-resistance network model. The procedure and performance, in comparison to a conventional FEM approach, is demonstrated and verified on an accelerometer-type MEMS device, for which the simulation results are compared with analytical damping models and experimentally obtained data.

Henry Schmidt | Alexander Sorger | Jan E. Mehner

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