A comparison of unified vs. segregated automated material handling systems for 300 mm fabs

300 mm fab automation may have to evolve sooner than expected A gradual migration from the traditionally segregated interbay and intrabay automation systems to a unified Automated Material Handling Systems (unified AMHS) has already begun. This study investigates the gains realized by different configurations of unified AMHS over segregated systems. Improved reliability and performance are projected for unified AMHS configurations.

[1]  Robert J. Gaskins,et al.  Automated material handling system traffic control by means of node balancing , 2000, 2000 Winter Simulation Conference Proceedings (Cat. No.00CH37165).

[2]  D. Pillai,et al.  Integration of 300 mm fab layouts and material handling automation , 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).