Synthesis of novel fluorinated norbornene derivatives for 157-nm application
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Hirokazu Aoyama | Takuji Ishikawa | Meiten Koh | Takayuki Araki | Tsuneo Yamashita | Minoru Toriumi | Takamitsu Furukawa | Toshiro Itani | Tamio Yamazaki | T. Furukawa | M. Koh | H. Aoyama | T. Itani | T. Araki | T. Yamashita | T. Ishikawa | M. Toriumi | T. Yamazaki
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