On the Nonlinear Dynamics of Tether Suspensions for MEMS

Many MEM devices feature tether suspensions and it is known that the tethers induce a stiffening behavior In this paper, we develop a model for a tether and, from it, establish several useful expressions for the nonlinear restoring forces and torques it provides. For a specific gyroscope, the expressions we find are compared to experimental results.

[1]  M. Rubin.  Cosserat Theories: Shells, Rods and Points , 2000 .

[2]  William C. Tang,et al.  Laterally Driven Polysilicon Resonant Microstructures , 1989 .

[3]  A.P. Pisano,et al.  Dual axis operation of a micromachined rate gyroscope , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[4]  N. C. MacDonald,et al.  Five parametric resonances in a microelectromechanical system , 1998, Nature.

[5]  N. Laws,et al.  Remarks on the theory of rods , 1973 .

[6]  S. Antman.  Nonlinear problems of elasticity , 1994 .

[7]  Oliver M. O’Reilly,et al.  Some Remarks on Invariance Requirements for Constrained Rods , 1996 .

[8]  Kun Wang,et al.  VHF free-free beam high-Q micromechanical resonators , 2000 .

[9]  Miko Elwenspoek,et al.  Nonlinearity and Hysteresis of Resonant Strain Gauges , 1998 .

[10]  R. Howe,et al.  Micromechanical structures for thin film characterization , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[11]  Miko Elwenspoek,et al.  Micro resonant force gauges , 1992 .

[12]  P. M. Naghdi,et al.  Finite Deformation of Elastic Rods and Shells , 1981 .

[13]  Takahisa Masuzawa,et al.  Mechanical nonlinearities in a magnetically actuated resonator , 2000 .

[14]  S. Senturia.  Microsystem Design , 2000 .

[15]  C. Nguyen,et al.  Micromechanical resonators for oscillators and filters , 1995, 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.