In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition
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Sbs Stephan Heil | W. Keuning | W. Kessels | M. V. D. van de Sanden | W. Kessels | Van de Sanden | E. Langereis | H. Knoops | W. E. Kessels | S. S. Heil | H. C. M. Knoops | Hcm Harm Knoops