论文信息 - Elimination of Voids at Interface of β-SiC Films and Si Substrate by Laser CVD - 字舞流文

Elimination of Voids at Interface of β-SiC Films and Si Substrate by Laser CVD

Lianmeng Zhang | Qing Xu | T. Goto | P. Zhu | R. Tu | Song Zhang | Meijun Yang | Jiasheng Yan | Shusen Li | Hansheng Guo