Porous Silicon as an Effective Material for Thermal Isolation on Bulk Crystalline Silicon
暂无分享,去创建一个
[1] I. Berbezier,et al. Sub-micrometre luminescent porous silicon structures using lithographically patterned substrates , 1995 .
[2] V. Lysenko,et al. Thick oxidised porous silicon layers for the design of a biomedical thermal conductivity microsensor , 1999 .
[3] G. Kaltsas,et al. Frontside bulk silicon micromachining using porous-silicon technology , 1998 .
[4] G Kaltsas,et al. Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation , 1999 .
[5] E. Lüder,et al. Polycrystalline silicon-based sensors , 1986 .