The Reliability Research of Typical Structures of Electrostatic drive Comb Gyroscope

This paper analyzes the reliability for gyroscope and its structure parameters has been optimized.The reliability effection factors of typical structures are researched,such as comb diver,parallel plate capacitor and cantilever.The structure parameters of comb diver meet the stability requirement.The pull-in voltage is get and the curvature affection of parallel plate on capacitor is researched.The range of the measure scale is limited to ensure the reliability of cantilever.