Study of broad bandwidth vibrational energy harvesting system with optimum thickness of PET substrate

Abstract In this paper, we present the development of a flexible PET-based (polyethylene terephthalate; PET) vibrational energy harvesting system with broad bandwidth. This broad bandwidth harvesting system comprises of four units of individual ZnO (zinc oxide) piezoelectric harvester in the form of a cantilever structure connected in parallel, and rectifying circuit with storage module. This system has ability to convert mechanical energy into electrical energy from the varying ambient vibration. The design and simulation of a piezoelectric cantilever plate was described by using commercial software ANSYS FEA (Finite Element Analysis) to determine the optimum thickness of PET substrate, internal stress distribution, operation frequency and electric potential. With the optimum thickness predicted by developed accurate analytical formula analysis, the one-way mechanical strain that is efficient to enhance the induced electric potential can be controlled within the piezoelectric ZnO layer. In addition, the relationship among the model solution of piezoelectric cantilever plate equation, vibration-induced electric potential and electric power was realized. An individual piezoelectric harvester consists of flexible PET substrate, piezoelectric ZnO thin film with (002) c-axis preferred orientation, and selectively deposited UV-curable resin lump structure which is used to change the resonant frequency of the harvester. In combination with multi-harvesters and rectifying with storage module together, an energy harvesting system with broad bandwidth can be fabricated. One individual harvester achieves a maximum OCV (open-circuit voltage) up to 4 V with power density of 1.247 μW/cm 3 . So far, we succeeded in accomplishing a broad bandwidth system with operating frequency range within 100 Hz–450 Hz to enhance powering efficiency. When the DC voltage (direct current voltage) across a storage module is charged up to 1.55 V after rectification, a flash LED (light emitting diode) is driven.

[1]  Neil M. White,et al.  Towards a piezoelectric vibration-powered microgenerator , 2001 .

[2]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[3]  Siak Piang Lim,et al.  Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications , 2004 .

[4]  C. K. Lee,et al.  Multi-cantilever piezoelectric MEMS generator in energy harvesting , 2009, 2009 IEEE International Ultrasonics Symposium.

[5]  Jen-Yuan Chang,et al.  Self-Powered Kinetic Energy Harvesters for Seek-Induced Vibrations in Hard Disk Drives , 2010 .

[6]  B. Lin,et al.  Defect photoluminescence of undoping ZnO films and its dependence on annealing conditions , 2001 .

[7]  Adriana Passaseo,et al.  AlN on polysilicon piezoelectric cantilevers for sensors/actuators , 2009 .

[8]  W. Hwang,et al.  Finite Element Modeling of Piezoelectric Sensors and Actuators , 1993 .

[9]  V. B. Venkayya,et al.  Finite element analysis of laminated composite structures containing distributed piezoelectric actuators and sensors , 1995 .

[10]  Di Chen,et al.  A MEMS-based piezoelectric power generator array for vibration energy harvesting , 2008, Microelectron. J..

[11]  A. Ugural.  Stresses in plates and shells , 1981 .

[12]  Cheng-Tang Pan,et al.  Design and fabrication of flexible piezo-microgenerator by depositing ZnO thin films on PET substrates , 2010 .

[13]  Zhihua Feng,et al.  Right-angle piezoelectric cantilever with improved energy harvesting efficiency , 2010 .

[14]  C. K. Lee,et al.  Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film , 2009 .

[15]  Wei-Tsai Chang,et al.  Design and fabrication of a piezoelectric transducer for wind-power generator , 2011 .

[16]  S. Beeby,et al.  A novel thick-film piezoelectric micro-generator , 2001 .

[17]  Guo-Hua Feng,et al.  Optimal FOM Designed Piezoelectric Microgenerator with Energy Harvesting in a Wide Vibration Bandwidth , 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[18]  Sang-Gook Kim,et al.  MEMS power generator with transverse mode thin film PZT , 2005 .

[19]  Skandar Basrour,et al.  Vibration Energy Harvesting with PZT Micro Device , 2009 .

[20]  Seung-Bok Choi,et al.  An investigation on piezoelectric energy harvesting for MEMS power sources , 2005 .

[21]  Po-Tsung Hsieh,et al.  Structural effect on UV emission properties of high-quality ZnO thin films deposited by RF magnetron sputtering , 2007 .

[22]  Jan M. Rabaey,et al.  Improving power output for vibration-based energy scavengers , 2005, IEEE Pervasive Computing.

[23]  H. Gamble,et al.  Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application , 2006 .

[24]  Elias Siores,et al.  Utilisation of smart polymers and ceramic based piezoelectric materials for scavenging wasted energy , 2010 .

[25]  K. Nakamura,et al.  Electric power generation using a vibration of a polyurea piezoelectric thin film , 2008, 2008 IEEE Ultrasonics Symposium.

[26]  Wei-Tsai Chang,et al.  Wind-power generators based on ZnO piezoelectric thin films on stainless steel substrates , 2011 .

[27]  Gou-Jen Wang,et al.  Analytical modeling of piezoelectric vibration-induced micro power generator , 2006 .

[28]  Sundman Bo.,et al.  エレクトロウェッティングディスプレイの油脱ぬれパターンの観測と光学的意味 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター , 2008 .