GaAs/AlAs layered films

Abstract The use of molecular beam epitaxy to form ordered layered crystals of GaAs and AlAs by alternate-monolayer epitaxial deposition is reviewed. The structures were examined by electron and X-ray diffraction. The relation of the optical properties to the structure is reviewed and new phonon modes associated with the structure are described. The results of alternate-monolayer deposition of other semiconductors are reported.