Production And Evaluation Of Supersmooth X-Ray Synchrotron Mirror Surfaces

The manufacturing tolerances for X-ray mirrors used for synchrotron radiation are demanding, in that departures from the theoretical surface may not exceed a few 1/10 μm, and the small scale roughness should not exceed 1 nm peak to valley. Both large and small scale deviations are measured with contacting probe instruments. X-ray mirrors must be stable and radiation resistant in intense synchrotron beams. Alternatives to silica glass include electroless nickel and silicon carbide. These materials can be finished to yield a small scale roughness of no more than a few 1/10 nm peak to valley.