论文信息 - Cl4(PhCN)W(NPh) as a single-source MOCVD precursor for deposition of tungsten nitride (WNx) thin films - 字舞流文

Cl4(PhCN)W(NPh) as a single-source MOCVD precursor for deposition of tungsten nitride (WNx) thin films

L. McElwee‐White | D. Powell | T. Anderson | M. Hlad | O. Bchir | B. C. Brooks | K. M. Green | Corey B. Wilder