Terahertz NbN hot electron bolometer fabrication process with a reduced number of steps
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J. Villégier | J. Krieg | Y. Jin | W. Miao | Y. Delorme | R. Lefèvre | T. Vacelet | F. Dauplay | L. Pelay | J. Spatazza | G. Gay | A. Feret | M. Ba-Trung