Breakthrough Problem Solving Using TRIZ Component Trimming

Based on TRIZ (Theory of Inventive Problem Solving) methodology, the systematic component Trimming Algorithm to solve Process-Equipment Problems is used to trim components of any physical devices/products without compromising its performance and to resolve process-machine problems by re-designing the problematic processing machines with fewer components and less cost. Applied on a slit-valve failure of a piece of chemical vapor deposition equipment in one of major Taiwanese foundry companies, the proposed problem solving process successfully identified the critical key disadvantages of the problem and solved the slit-valve failure. The paper contributes to establish an integrated trimming process consistent with TRIZ problem-solving mode and capable of breakthrough problem solving and cost savings, effectively solving the slit-valve problem. The results have been converted into a patent pending approval.