High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous Silicon surface micromachining
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Adrian M. Ionescu | Catherine Dehollain | Florin Udrea | Michel Declercq | A. Chovet | J.-P. Curty | J. Boussey | C. Hibert | R. Fritschi | D. Tsamados | Ph. Flückiger | S. Frederico | P. Renaud | R. K. M. Ng
[1] Sung-Mo Kang,et al. Development of a wide tuning range MEMS tunable capacitor for wireless communication systems , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).