30 GHz RF-MEMS Dicke Switch Network and a Wideband LNA in a 0.25 µm SiGe BiCMOS Technology

This work presents a novel monolithic integration of a 30 GHz RF-MEMS Dicke switch network and a wideband LNA realised in a 0.25 μm SiGe BiCMOS process. The wideband LNA design has a measured gain of 10-19.9 dB at 2-33 GHz given a DC power consumption (PDC) of 35 mW and a measured noise figure of 5.4-6.3 dB at 14-26.5 GHz when PDC=7.5 mW (the LNA gain is then 10-14.2 dB at 4-26 GHz). The Dicke switch has 3 dB and 22 dB of losses and isolation at 25 GHz. The MEMS switched LNA gain was found to be 10-17 dB lower than anticipated due to some unintentionally missing metal via contacts between the Dicke switch and LNA ground planes. Despite this fact, the MEMS LNA resulted in a measured isolation of 9.0-13.5 dB at 24-31 GHz when the Dicke switch was switched ON and OFF which validates the switching function of the SiGe RF-MEMS wideband LNA design. Such reconfigurable low-power MEMS switched RFICs could be used in highly adaptive broadband receiver front-ends for wireless communication, sensor networks and imaging systems, for example.

[1]  M. Kaynak,et al.  BiCMOS embedded RF-MEMS switch for above 90 GHz applications using backside integration technique , 2010, 2010 International Electron Devices Meeting.

[2]  C. Samuelsson,et al.  A 0-level packaged RF-MEMS switched wideband GaAs LNA MMIC , 2013, 2013 European Microwave Integrated Circuit Conference.

[3]  H. Schumacher,et al.  A 60 to 77 GHz Switchable LNA in an RF-MEMS Embedded BiCMOS Technology , 2012, IEEE Microwave and Wireless Components Letters.

[4]  Fa Foster Dai,et al.  An 8 – 18 GHz wideband SiGe BiCMOS low noise amplifier , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[5]  P.J. Riemer,et al.  Ka-band (35 GHz) 3-stage SiGe HBT low noise amplifier , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[6]  M. Kaynak,et al.  Robustness and reliability of BiCMOS embedded RF-MEMS switch , 2011, 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.

[7]  Korbinian Schraml,et al.  Multi-layer patch antenna array design for Ka-band satellite communication , 2013, 2013 SBMO/IEEE MTT-S International Microwave & Optoelectronics Conference (IMOC).

[8]  Luca Roselli,et al.  Design of a Ka-Band LNA for SoC space-based millimeter-wave radiometers , 2011, 2011 IEEE MTT-S International Microwave Workshop Series on Millimeter Wave Integration Technologies.

[9]  Gabriel M. Rebeiz,et al.  Design and Characterization of $W$-Band SiGe RFICs for Passive Millimeter-Wave Imaging , 2010, IEEE Transactions on Microwave Theory and Techniques.

[10]  J.B. Hacker,et al.  A monolithic MEMS switched dual-path power amplifier , 2001, IEEE Microwave and Wireless Components Letters.

[11]  M. Kaynak,et al.  BEOL embedded RF-MEMS switch for mm-wave applications , 2009, 2009 IEEE International Electron Devices Meeting (IEDM).

[12]  M. Kaynak,et al.  Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads , 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest.

[13]  J.F. DeNatale,et al.  Monolithic GaAs PHEMT MMICs integrated with RF MEMS switches , 2004, IEEE Compound Semiconductor Integrated Circuit Symposium, 2004..

[14]  Hermann Schumacher,et al.  24 to 79 GHz frequency band reconfigurable LNA , 2012 .

[15]  Simon Anger,et al.  Design of an integrated Ka band receiver module for passive microwave imaging systems , 2011, 2011 Semiconductor Conference Dresden.

[16]  D. Elad,et al.  Key components of a 130 GHz dicke-radiometer SiGe RFIC , 2013, 2013 IEEE 13th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems.

[17]  Vipul Jain,et al.  Design and Analysis of a W-Band SiGe Direct-Detection-Based Passive Imaging Receiver , 2011, IEEE Journal of Solid-State Circuits.

[18]  Zhiming Chen,et al.  A BiCMOS W-Band 2×2 Focal-Plane Array With On-Chip Antenna , 2012, IEEE Journal of Solid-State Circuits.

[19]  Gabriel M. Rebeiz,et al.  Ka-Band SiGe HBT Low Noise Amplifier Design for Simultaneous Noise and Input Power Matching , 2007, IEEE Microwave and Wireless Components Letters.

[20]  John D. Cressler,et al.  Analysis and design of a 3–26 GHz low-noise amplifier in SiGe HBT technology , 2012, 2012 IEEE Radio and Wireless Symposium.

[21]  J.L. Cazaux,et al.  Flexible Ka-Band Low Noise Amplifier Sub-System for Oncoming Satellite Payloads , 2006, 2006 European Microwave Conference.

[22]  T. Nakamura,et al.  SiGe HBT based 24-GHz LNA and VCO for Short-Range Ultra-Wideband Radar Systems , 2005, 2005 IEEE Asian Solid-State Circuits Conference.

[23]  Andreas Gustafsson,et al.  A K-band single-chip reconfigurable/multi-functional RF-MEMS switched dual-LNA MMIC , 2012, 2012 IEEE/MTT-S International Microwave Symposium Digest.