One-dimensional error-diffusion technique adapted for binarization of rotationally symmetric pupil filters

Abstract Two novel algorithms for the binarization of continuous rotationally symmetric real and positive pupil filters are presented. Both algorithms are based on the one-dimensional error diffusion concept. In our numerical experiment an original gray-tone apodizer is substituted by a set of transparent and opaque concentric annular zones. Depending on the algorithm the resulting binary mask consists of either equal width or equal area zones. The diffractive behavior of binary filters is evaluated. It is shown that the filter with equal width zones gives Fraunhofer diffraction pattern more similar to that of the original gray-tone apodizer than that with equal area zones, assuming in both cases the same resolution limit of device used to print both filters.