The IMPRINT software: quantitative prediction of process parameters for successful nanoimprint lithography

The IMPRINT software is applied for simultaneous calculation of the resist viscous flow in thermal nanoimprint lithography (NIL) and the stamp/substrate deformation. From the presented comparison of calculated and experimental results, it can be concluded that the simulation allows predicting the residual layer thickness with accuracy better than 10%. The obtained results demonstrate the potential of the IMPRINT software as an efficient tool for choosing NIL process parameters and the optimization of the NIL stamp geometry.