A monolithic capacitive pressure sensor with pulse-period output

A batch-fabricated 2.8 × 3.4mm monolithic capacitive pressure sensor, replacing piezoresistive pressure transducers, employing on-chip (less than 10mm2) circuitry, with current drain of 20μA operating at 2.5-20V, will be reported.

[1]  G. Wallis,et al.  Field Assisted Glass‐Metal Sealing , 1969 .

[2]  B. N. Cole,et al.  Plates and Shells , 1965, Nature.

[3]  J. Knutti,et al.  A monolithic signal processor for multichannel implantable telemetry , 1979, 1979 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[4]  W. G. Wolber,et al.  Sensor development in the microcomputer age , 1979, IEEE Transactions on Electron Devices.