Metal deposition with femtosecond light pulses at atmospheric pressure

Femtosecond pulses of 400 nm light have been used to deposit Cr from adsorbed layers of Cr(CO)6 on both transparent and absorbing substrates, in air. Highly reflective Cr metal lines were deposited on fused silica substrates with linewidths as small as 200 nm and smaller still for Cr deposition on Au substrates. Metal deposition results from a multiphoton dissociation process which decomposes the metal hexacarbonyl in the adsorbed layer. Deposition of subsequent Cr layers reveals a change in the dissociation mechanism.

[1]  A. Tünnermann,et al.  Femtosecond, picosecond and nanosecond laser ablation of solids , 1996 .

[2]  T. Jones,et al.  Low-energy electron beam induced dissociation of methyl groups chemisorbed on semiconductor surfaces: (CH3)3Al adsorbed on GaAs and InSb , 1998 .

[3]  Alfred Wagner,et al.  Implementation and performance of a femtosecond laser mask repair system in manufacturing , 1998, Photomask Technology.

[4]  P. P. Pronko,et al.  Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses , 1995 .

[5]  James G. Fujimoto,et al.  Femtosecond Laser Interaction with Metallic Tungsten and Nonequilibrium Electron and Lattice Temperatures , 1984, Topical Meeting on Ultrafast Phenomena.

[6]  J. Steinfeld,et al.  Deposition of refractory metal films by rare‐gas halide laser photodissociation of metal carbonyls , 1986 .

[7]  Richard M. Osgood,et al.  Direct writing of metal conductors with near-uv light , 1987 .

[8]  Frances A. Houle,et al.  Photochemical deposition of thin films from the metal hexacarbonyls , 1990 .

[9]  Melvin Lax,et al.  Temperature rise induced by a laser beam , 1977 .

[10]  Alfred Wagner,et al.  MARS: Femtosecond laser mask advanced repair system in manufacturing , 1999 .

[11]  Heinz,et al.  Desorption induced by multiple electronic transitions. , 1992, Physical review letters.

[12]  W. Fuß,et al.  Femtosecond Dynamics and Vibrational Coherence in Gas-Phase Ultraviolet Photodecomposition of Cr(CO)6 , 1998 .

[13]  Da Yu Tzou,et al.  Temperature-dependent thermal lagging in ultrafast laser heating , 2001 .

[14]  G. Mourou,et al.  Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[15]  A. Zewail,et al.  Femtochemistry of organometallics: dynamics of metal-metal and metal-ligand bond cleavage in M2(CO)10 , 1995 .

[16]  Michael Heuken,et al.  Modeling of InGaN MOVPE in AIX 200 Reactor and AIX 2000 HT Planetary Reactor , 1999 .

[17]  Norris,et al.  Time-resolved observation of electron-phonon relaxation in copper. , 1987, Physical review letters.

[18]  C. L. Tien,et al.  Femtosecond laser heating of multi-layer metals—I. Analysis , 1994 .

[19]  A. Nitzan,et al.  Theoretical model for enhanced photochemistry on rough surfaces , 1981 .

[20]  Continuous wave visible laser assisted decomposition of chromium hexacarbonyl on a growing film: in situ observations , 1992 .

[21]  R. Jackson,et al.  CW and pulsed UV laser-induced deposition from Cr(CO)6, Mo(CO)6, and W(CO)6 , 1989 .