论文信息 - Constraints on the Application of 0.5-/spl mu/m MOSFET's to ULSI Systems

Constraints on the Application of 0.5-/spl mu/m MOSFET's to ULSI Systems

The characteristics of a MOSFET with an L/sub eff/= 0.5/spl mu/. which is a building element of the next generation of ULSI's,are described from two viewpoints 1) "deviation" from the scaling law and 2) "system level scaling" and are compared with those of 1.3-, 2-, and 3-/spl mu/m design rules. In the light of the fact that further improvements in the characteristics of small-sized devices are diminishing, it is mentioned that from now on it will be more necessary to concentrate on the system-oriented approach, rather than device and process technologies. In addition, to aid the selection of a new standard for power supply voltage, the allowable operating bias regions in 0.5-/spl mu/m devices are discussed.

Eiji Takeda | H. Ahmed | G.A.C. Jones

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