论文信息 - Study of aluminum nitride films deposited on silicon for fabrication of MEMs devices - 字舞流文

Study of aluminum nitride films deposited on silicon for fabrication of MEMs devices

A. S. S. Sobrinho | D. Leite | Newton A S Gomes | Péricles Lopes SantAna | André L J Pereira | Julio Cezar Faria