论文信息 - Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Integration of clamped-clamped suspended single-walled carbon nanotubes into SOI MEMS

Processes aiming at integrating suspended single-walled carbon nanotubes (SWNTs) into Micro-Electromechanical Systems (MEMS) have to deal explicitly with the fragility of SWNTs. In general, SWNT growth is delayed to the last step of a process so as to avoid any contamination and physical damage, which restricts the flexibility of an integration process. Here, we present a novel integration process involving a sacrificial bridge structure that provides SWNTs with physical support throughout the process. Thus, post-growth wet processes are enabled, and mechanical rupturing is prevented. With this novel approach, clamped-clamped suspended SWNTs with resistances down to 115 kΩ (with 2 µm suspended segment) are integrated into SOI micro-structures.

[1] C. Hierold,et al. SWNT Growth by LPCVD on Ferritin-Based Iron Catalyst Nanoparticles Towards CNT Sensors , 2007 .

[2] Jannik C. Meyer,et al. Synthesis of individual single-walled carbon nanotube bridges controlled by support micromachining , 2007 .

[3] Qian Wang,et al. Integration of suspended carbon nanotube arrays into electronic devices and electromechanical systems , 2002 .

[4] P. Ajayan,et al. Substrate effects on the growth of carbon nanotubes by thermal decomposition of methane , 2003 .

[5] M. Lundstrom,et al. Self-Aligned Ballistic Molecular Transistors and Electrically Parallel Nanotube Arrays , 2004, cond-mat/0406494.

[6] C. Hierold,et al. Encapsulation of electrical contacts for suspended single‐walled carbon nanotubes by atomic layer deposition , 2010 .

[7] C. Hierold,et al. Hysteresis-free operation of suspended carbon nanotube transistors. , 2010, Nature nanotechnology.

[8] Y. Hanein,et al. Integration of suspended carbon nanotubes into micro-fabricated devices , 2009 .

[9] C. Hierold,et al. Long term investigations of carbon nanotube transistors encapsulated by atomic-layer-deposited Al2O3 for sensor applications , 2009, Nanotechnology.