论文信息 - Very high crystalline quality of thick 4H‐SiC epilayers grown from methyltrichlorosilane (MTS) - 字舞流文

Very high crystalline quality of thick 4H‐SiC epilayers grown from methyltrichlorosilane (MTS)

A. Henry | E. Janzén | V. Darakchieva | P. Carlsson | A. Gällström | S. Leone | H. Pedersen | E. Janzén