Fabrication of Dammann Gratings in Silica Glass Using a Filament of Femtosecond Laser

The Dammann grating is one kind of useful binary optical elements. We fabricated a single-layer birefringence-free 5?5 Dammann grating in silica glass using the filamentation of 800 nm femtosecond laser pulses. The diffraction efficiency of the Dammann grating reached 56%, which is close to the theoretical value of 77%.